| 1 | <?xml version="1.0"?> |
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| 2 | <dia:diagram xmlns:dia="http://www.lysator.liu.se/~alla/dia/"> |
|---|
| 3 | <dia:diagramdata> |
|---|
| 4 | <dia:attribute name="background"> |
|---|
| 5 | <dia:color val="#ffffff"/> |
|---|
| 6 | </dia:attribute> |
|---|
| 7 | <dia:attribute name="paper"> |
|---|
| 8 | <dia:composite type="paper"> |
|---|
| 9 | <dia:attribute name="name"> |
|---|
| 10 | <dia:string>#A4#</dia:string> |
|---|
| 11 | </dia:attribute> |
|---|
| 12 | <dia:attribute name="tmargin"> |
|---|
| 13 | <dia:real val="2.8222"/> |
|---|
| 14 | </dia:attribute> |
|---|
| 15 | <dia:attribute name="bmargin"> |
|---|
| 16 | <dia:real val="2.8222"/> |
|---|
| 17 | </dia:attribute> |
|---|
| 18 | <dia:attribute name="lmargin"> |
|---|
| 19 | <dia:real val="2.8222"/> |
|---|
| 20 | </dia:attribute> |
|---|
| 21 | <dia:attribute name="rmargin"> |
|---|
| 22 | <dia:real val="2.8222"/> |
|---|
| 23 | </dia:attribute> |
|---|
| 24 | <dia:attribute name="is_portrait"> |
|---|
| 25 | <dia:boolean val="true"/> |
|---|
| 26 | </dia:attribute> |
|---|
| 27 | <dia:attribute name="scaling"> |
|---|
| 28 | <dia:real val="1"/> |
|---|
| 29 | </dia:attribute> |
|---|
| 30 | <dia:attribute name="fitto"> |
|---|
| 31 | <dia:boolean val="false"/> |
|---|
| 32 | </dia:attribute> |
|---|
| 33 | </dia:composite> |
|---|
| 34 | </dia:attribute> |
|---|
| 35 | <dia:attribute name="grid"> |
|---|
| 36 | <dia:composite type="grid"> |
|---|
| 37 | <dia:attribute name="width_x"> |
|---|
| 38 | <dia:real val="1"/> |
|---|
| 39 | </dia:attribute> |
|---|
| 40 | <dia:attribute name="width_y"> |
|---|
| 41 | <dia:real val="1"/> |
|---|
| 42 | </dia:attribute> |
|---|
| 43 | <dia:attribute name="visible_x"> |
|---|
| 44 | <dia:int val="1"/> |
|---|
| 45 | </dia:attribute> |
|---|
| 46 | <dia:attribute name="visible_y"> |
|---|
| 47 | <dia:int val="1"/> |
|---|
| 48 | </dia:attribute> |
|---|
| 49 | </dia:composite> |
|---|
| 50 | </dia:attribute> |
|---|
| 51 | <dia:attribute name="guides"> |
|---|
| 52 | <dia:composite type="guides"> |
|---|
| 53 | <dia:attribute name="hguides"/> |
|---|
| 54 | <dia:attribute name="vguides"/> |
|---|
| 55 | </dia:composite> |
|---|
| 56 | </dia:attribute> |
|---|
| 57 | </dia:diagramdata> |
|---|
| 58 | <dia:layer name="Background" visible="true"> |
|---|
| 59 | <dia:object type="Standard - Box" version="0" id="O0"> |
|---|
| 60 | <dia:attribute name="obj_pos"> |
|---|
| 61 | <dia:point val="1.35,6.73993"/> |
|---|
| 62 | </dia:attribute> |
|---|
| 63 | <dia:attribute name="obj_bb"> |
|---|
| 64 | <dia:rectangle val="1.325,6.71493;9.98571,10.9"/> |
|---|
| 65 | </dia:attribute> |
|---|
| 66 | <dia:attribute name="elem_corner"> |
|---|
| 67 | <dia:point val="1.35,6.73993"/> |
|---|
| 68 | </dia:attribute> |
|---|
| 69 | <dia:attribute name="elem_width"> |
|---|
| 70 | <dia:real val="8.61071"/> |
|---|
| 71 | </dia:attribute> |
|---|
| 72 | <dia:attribute name="elem_height"> |
|---|
| 73 | <dia:real val="4.13507"/> |
|---|
| 74 | </dia:attribute> |
|---|
| 75 | <dia:attribute name="border_width"> |
|---|
| 76 | <dia:real val="0.05"/> |
|---|
| 77 | </dia:attribute> |
|---|
| 78 | <dia:attribute name="show_background"> |
|---|
| 79 | <dia:boolean val="true"/> |
|---|
| 80 | </dia:attribute> |
|---|
| 81 | </dia:object> |
|---|
| 82 | <dia:object type="Standard - Text" version="0" id="O1"> |
|---|
| 83 | <dia:attribute name="obj_pos"> |
|---|
| 84 | <dia:point val="6.11071,6.41493"/> |
|---|
| 85 | </dia:attribute> |
|---|
| 86 | <dia:attribute name="obj_bb"> |
|---|
| 87 | <dia:rectangle val="3.22715,6.10749;8.99427,6.50749"/> |
|---|
| 88 | </dia:attribute> |
|---|
| 89 | <dia:attribute name="text"> |
|---|
| 90 | <dia:composite type="text"> |
|---|
| 91 | <dia:attribute name="string"> |
|---|
| 92 | <dia:string>#Chemical vapor deposition reactor#</dia:string> |
|---|
| 93 | </dia:attribute> |
|---|
| 94 | <dia:attribute name="font"> |
|---|
| 95 | <dia:font name="Times-Roman"/> |
|---|
| 96 | </dia:attribute> |
|---|
| 97 | <dia:attribute name="height"> |
|---|
| 98 | <dia:real val="0.4"/> |
|---|
| 99 | </dia:attribute> |
|---|
| 100 | <dia:attribute name="pos"> |
|---|
| 101 | <dia:point val="6.11071,6.41493"/> |
|---|
| 102 | </dia:attribute> |
|---|
| 103 | <dia:attribute name="color"> |
|---|
| 104 | <dia:color val="#000000"/> |
|---|
| 105 | </dia:attribute> |
|---|
| 106 | <dia:attribute name="alignment"> |
|---|
| 107 | <dia:enum val="1"/> |
|---|
| 108 | </dia:attribute> |
|---|
| 109 | </dia:composite> |
|---|
| 110 | </dia:attribute> |
|---|
| 111 | </dia:object> |
|---|
| 112 | <dia:object type="Standard - Box" version="0" id="O2"> |
|---|
| 113 | <dia:attribute name="obj_pos"> |
|---|
| 114 | <dia:point val="1.53571,10.6149"/> |
|---|
| 115 | </dia:attribute> |
|---|
| 116 | <dia:attribute name="obj_bb"> |
|---|
| 117 | <dia:rectangle val="1.53571,10.6149;2.18571,11.0149"/> |
|---|
| 118 | </dia:attribute> |
|---|
| 119 | <dia:attribute name="elem_corner"> |
|---|
| 120 | <dia:point val="1.53571,10.6149"/> |
|---|
| 121 | </dia:attribute> |
|---|
| 122 | <dia:attribute name="elem_width"> |
|---|
| 123 | <dia:real val="0.65"/> |
|---|
| 124 | </dia:attribute> |
|---|
| 125 | <dia:attribute name="elem_height"> |
|---|
| 126 | <dia:real val="0.4"/> |
|---|
| 127 | </dia:attribute> |
|---|
| 128 | <dia:attribute name="border_width"> |
|---|
| 129 | <dia:real val="0"/> |
|---|
| 130 | </dia:attribute> |
|---|
| 131 | <dia:attribute name="border_color"> |
|---|
| 132 | <dia:color val="#ffffff"/> |
|---|
| 133 | </dia:attribute> |
|---|
| 134 | <dia:attribute name="show_background"> |
|---|
| 135 | <dia:boolean val="true"/> |
|---|
| 136 | </dia:attribute> |
|---|
| 137 | </dia:object> |
|---|
| 138 | <dia:object type="Standard - Text" version="0" id="O3"> |
|---|
| 139 | <dia:attribute name="obj_pos"> |
|---|
| 140 | <dia:point val="1.86071,11.6149"/> |
|---|
| 141 | </dia:attribute> |
|---|
| 142 | <dia:attribute name="obj_bb"> |
|---|
| 143 | <dia:rectangle val="1.40115,11.3075;2.32027,12.1075"/> |
|---|
| 144 | </dia:attribute> |
|---|
| 145 | <dia:attribute name="text"> |
|---|
| 146 | <dia:composite type="text"> |
|---|
| 147 | <dia:attribute name="string"> |
|---|
| 148 | <dia:string>#gas |
|---|
| 149 | inlet#</dia:string> |
|---|
| 150 | </dia:attribute> |
|---|
| 151 | <dia:attribute name="font"> |
|---|
| 152 | <dia:font name="Times-Roman"/> |
|---|
| 153 | </dia:attribute> |
|---|
| 154 | <dia:attribute name="height"> |
|---|
| 155 | <dia:real val="0.4"/> |
|---|
| 156 | </dia:attribute> |
|---|
| 157 | <dia:attribute name="pos"> |
|---|
| 158 | <dia:point val="1.86071,11.6149"/> |
|---|
| 159 | </dia:attribute> |
|---|
| 160 | <dia:attribute name="color"> |
|---|
| 161 | <dia:color val="#000000"/> |
|---|
| 162 | </dia:attribute> |
|---|
| 163 | <dia:attribute name="alignment"> |
|---|
| 164 | <dia:enum val="1"/> |
|---|
| 165 | </dia:attribute> |
|---|
| 166 | </dia:composite> |
|---|
| 167 | </dia:attribute> |
|---|
| 168 | </dia:object> |
|---|
| 169 | <dia:object type="Standard - Line" version="0" id="O4"> |
|---|
| 170 | <dia:attribute name="obj_pos"> |
|---|
| 171 | <dia:point val="2.63571,6.71493"/> |
|---|
| 172 | </dia:attribute> |
|---|
| 173 | <dia:attribute name="obj_bb"> |
|---|
| 174 | <dia:rectangle val="2.58571,6.66493;2.68571,10.9149"/> |
|---|
| 175 | </dia:attribute> |
|---|
| 176 | <dia:attribute name="conn_endpoints"> |
|---|
| 177 | <dia:point val="2.63571,6.71493"/> |
|---|
| 178 | <dia:point val="2.63571,10.8649"/> |
|---|
| 179 | </dia:attribute> |
|---|
| 180 | <dia:attribute name="numcp"> |
|---|
| 181 | <dia:int val="1"/> |
|---|
| 182 | </dia:attribute> |
|---|
| 183 | <dia:attribute name="line_width"> |
|---|
| 184 | <dia:real val="0.1"/> |
|---|
| 185 | </dia:attribute> |
|---|
| 186 | <dia:attribute name="line_style"> |
|---|
| 187 | <dia:enum val="1"/> |
|---|
| 188 | </dia:attribute> |
|---|
| 189 | <dia:attribute name="dashlength"> |
|---|
| 190 | <dia:real val="0.1"/> |
|---|
| 191 | </dia:attribute> |
|---|
| 192 | </dia:object> |
|---|
| 193 | <dia:object type="Standard - Line" version="0" id="O5"> |
|---|
| 194 | <dia:attribute name="obj_pos"> |
|---|
| 195 | <dia:point val="1.88571,11.1399"/> |
|---|
| 196 | </dia:attribute> |
|---|
| 197 | <dia:attribute name="obj_bb"> |
|---|
| 198 | <dia:rectangle val="1.58571,9.56493;2.18571,11.1899"/> |
|---|
| 199 | </dia:attribute> |
|---|
| 200 | <dia:attribute name="conn_endpoints"> |
|---|
| 201 | <dia:point val="1.88571,11.1399"/> |
|---|
| 202 | <dia:point val="1.88571,9.61493"/> |
|---|
| 203 | </dia:attribute> |
|---|
| 204 | <dia:attribute name="numcp"> |
|---|
| 205 | <dia:int val="1"/> |
|---|
| 206 | </dia:attribute> |
|---|
| 207 | <dia:attribute name="line_width"> |
|---|
| 208 | <dia:real val="0.1"/> |
|---|
| 209 | </dia:attribute> |
|---|
| 210 | <dia:attribute name="end_arrow"> |
|---|
| 211 | <dia:enum val="3"/> |
|---|
| 212 | </dia:attribute> |
|---|
| 213 | <dia:attribute name="end_arrow_length"> |
|---|
| 214 | <dia:real val="0.4"/> |
|---|
| 215 | </dia:attribute> |
|---|
| 216 | <dia:attribute name="end_arrow_width"> |
|---|
| 217 | <dia:real val="0.3"/> |
|---|
| 218 | </dia:attribute> |
|---|
| 219 | </dia:object> |
|---|
| 220 | <dia:object type="Standard - Line" version="0" id="O6"> |
|---|
| 221 | <dia:attribute name="obj_pos"> |
|---|
| 222 | <dia:point val="2.93571,7.06493"/> |
|---|
| 223 | </dia:attribute> |
|---|
| 224 | <dia:attribute name="obj_bb"> |
|---|
| 225 | <dia:rectangle val="2.91071,6.86493;3.71071,7.26493"/> |
|---|
| 226 | </dia:attribute> |
|---|
| 227 | <dia:attribute name="conn_endpoints"> |
|---|
| 228 | <dia:point val="2.93571,7.06493"/> |
|---|
| 229 | <dia:point val="3.68571,7.06493"/> |
|---|
| 230 | </dia:attribute> |
|---|
| 231 | <dia:attribute name="numcp"> |
|---|
| 232 | <dia:int val="1"/> |
|---|
| 233 | </dia:attribute> |
|---|
| 234 | <dia:attribute name="line_width"> |
|---|
| 235 | <dia:real val="0.05"/> |
|---|
| 236 | </dia:attribute> |
|---|
| 237 | <dia:attribute name="end_arrow"> |
|---|
| 238 | <dia:enum val="3"/> |
|---|
| 239 | </dia:attribute> |
|---|
| 240 | <dia:attribute name="end_arrow_length"> |
|---|
| 241 | <dia:real val="0.3"/> |
|---|
| 242 | </dia:attribute> |
|---|
| 243 | <dia:attribute name="end_arrow_width"> |
|---|
| 244 | <dia:real val="0.2"/> |
|---|
| 245 | </dia:attribute> |
|---|
| 246 | </dia:object> |
|---|
| 247 | <dia:object type="Standard - Line" version="0" id="O7"> |
|---|
| 248 | <dia:attribute name="obj_pos"> |
|---|
| 249 | <dia:point val="2.93571,7.76493"/> |
|---|
| 250 | </dia:attribute> |
|---|
| 251 | <dia:attribute name="obj_bb"> |
|---|
| 252 | <dia:rectangle val="2.91071,7.56493;3.71071,7.96493"/> |
|---|
| 253 | </dia:attribute> |
|---|
| 254 | <dia:attribute name="conn_endpoints"> |
|---|
| 255 | <dia:point val="2.93571,7.76493"/> |
|---|
| 256 | <dia:point val="3.68571,7.76493"/> |
|---|
| 257 | </dia:attribute> |
|---|
| 258 | <dia:attribute name="numcp"> |
|---|
| 259 | <dia:int val="1"/> |
|---|
| 260 | </dia:attribute> |
|---|
| 261 | <dia:attribute name="line_width"> |
|---|
| 262 | <dia:real val="0.05"/> |
|---|
| 263 | </dia:attribute> |
|---|
| 264 | <dia:attribute name="end_arrow"> |
|---|
| 265 | <dia:enum val="3"/> |
|---|
| 266 | </dia:attribute> |
|---|
| 267 | <dia:attribute name="end_arrow_length"> |
|---|
| 268 | <dia:real val="0.3"/> |
|---|
| 269 | </dia:attribute> |
|---|
| 270 | <dia:attribute name="end_arrow_width"> |
|---|
| 271 | <dia:real val="0.2"/> |
|---|
| 272 | </dia:attribute> |
|---|
| 273 | </dia:object> |
|---|
| 274 | <dia:object type="Standard - Line" version="0" id="O8"> |
|---|
| 275 | <dia:attribute name="obj_pos"> |
|---|
| 276 | <dia:point val="2.93571,8.48993"/> |
|---|
| 277 | </dia:attribute> |
|---|
| 278 | <dia:attribute name="obj_bb"> |
|---|
| 279 | <dia:rectangle val="2.91071,8.28993;3.71071,8.68993"/> |
|---|
| 280 | </dia:attribute> |
|---|
| 281 | <dia:attribute name="conn_endpoints"> |
|---|
| 282 | <dia:point val="2.93571,8.48993"/> |
|---|
| 283 | <dia:point val="3.68571,8.48993"/> |
|---|
| 284 | </dia:attribute> |
|---|
| 285 | <dia:attribute name="numcp"> |
|---|
| 286 | <dia:int val="1"/> |
|---|
| 287 | </dia:attribute> |
|---|
| 288 | <dia:attribute name="line_width"> |
|---|
| 289 | <dia:real val="0.05"/> |
|---|
| 290 | </dia:attribute> |
|---|
| 291 | <dia:attribute name="end_arrow"> |
|---|
| 292 | <dia:enum val="3"/> |
|---|
| 293 | </dia:attribute> |
|---|
| 294 | <dia:attribute name="end_arrow_length"> |
|---|
| 295 | <dia:real val="0.3"/> |
|---|
| 296 | </dia:attribute> |
|---|
| 297 | <dia:attribute name="end_arrow_width"> |
|---|
| 298 | <dia:real val="0.2"/> |
|---|
| 299 | </dia:attribute> |
|---|
| 300 | </dia:object> |
|---|
| 301 | <dia:object type="Standard - Line" version="0" id="O9"> |
|---|
| 302 | <dia:attribute name="obj_pos"> |
|---|
| 303 | <dia:point val="2.93571,9.16493"/> |
|---|
| 304 | </dia:attribute> |
|---|
| 305 | <dia:attribute name="obj_bb"> |
|---|
| 306 | <dia:rectangle val="2.91071,8.96493;3.71071,9.36493"/> |
|---|
| 307 | </dia:attribute> |
|---|
| 308 | <dia:attribute name="conn_endpoints"> |
|---|
| 309 | <dia:point val="2.93571,9.16493"/> |
|---|
| 310 | <dia:point val="3.68571,9.16493"/> |
|---|
| 311 | </dia:attribute> |
|---|
| 312 | <dia:attribute name="numcp"> |
|---|
| 313 | <dia:int val="1"/> |
|---|
| 314 | </dia:attribute> |
|---|
| 315 | <dia:attribute name="line_width"> |
|---|
| 316 | <dia:real val="0.05"/> |
|---|
| 317 | </dia:attribute> |
|---|
| 318 | <dia:attribute name="end_arrow"> |
|---|
| 319 | <dia:enum val="3"/> |
|---|
| 320 | </dia:attribute> |
|---|
| 321 | <dia:attribute name="end_arrow_length"> |
|---|
| 322 | <dia:real val="0.3"/> |
|---|
| 323 | </dia:attribute> |
|---|
| 324 | <dia:attribute name="end_arrow_width"> |
|---|
| 325 | <dia:real val="0.2"/> |
|---|
| 326 | </dia:attribute> |
|---|
| 327 | </dia:object> |
|---|
| 328 | <dia:object type="Standard - Line" version="0" id="O10"> |
|---|
| 329 | <dia:attribute name="obj_pos"> |
|---|
| 330 | <dia:point val="2.93571,9.81493"/> |
|---|
| 331 | </dia:attribute> |
|---|
| 332 | <dia:attribute name="obj_bb"> |
|---|
| 333 | <dia:rectangle val="2.91071,9.61493;3.71071,10.0149"/> |
|---|
| 334 | </dia:attribute> |
|---|
| 335 | <dia:attribute name="conn_endpoints"> |
|---|
| 336 | <dia:point val="2.93571,9.81493"/> |
|---|
| 337 | <dia:point val="3.68571,9.81493"/> |
|---|
| 338 | </dia:attribute> |
|---|
| 339 | <dia:attribute name="numcp"> |
|---|
| 340 | <dia:int val="1"/> |
|---|
| 341 | </dia:attribute> |
|---|
| 342 | <dia:attribute name="line_width"> |
|---|
| 343 | <dia:real val="0.05"/> |
|---|
| 344 | </dia:attribute> |
|---|
| 345 | <dia:attribute name="end_arrow"> |
|---|
| 346 | <dia:enum val="3"/> |
|---|
| 347 | </dia:attribute> |
|---|
| 348 | <dia:attribute name="end_arrow_length"> |
|---|
| 349 | <dia:real val="0.3"/> |
|---|
| 350 | </dia:attribute> |
|---|
| 351 | <dia:attribute name="end_arrow_width"> |
|---|
| 352 | <dia:real val="0.2"/> |
|---|
| 353 | </dia:attribute> |
|---|
| 354 | </dia:object> |
|---|
| 355 | <dia:object type="Standard - Line" version="0" id="O11"> |
|---|
| 356 | <dia:attribute name="obj_pos"> |
|---|
| 357 | <dia:point val="2.93571,10.4149"/> |
|---|
| 358 | </dia:attribute> |
|---|
| 359 | <dia:attribute name="obj_bb"> |
|---|
| 360 | <dia:rectangle val="2.91071,10.2149;3.71071,10.6149"/> |
|---|
| 361 | </dia:attribute> |
|---|
| 362 | <dia:attribute name="conn_endpoints"> |
|---|
| 363 | <dia:point val="2.93571,10.4149"/> |
|---|
| 364 | <dia:point val="3.68571,10.4149"/> |
|---|
| 365 | </dia:attribute> |
|---|
| 366 | <dia:attribute name="numcp"> |
|---|
| 367 | <dia:int val="1"/> |
|---|
| 368 | </dia:attribute> |
|---|
| 369 | <dia:attribute name="line_width"> |
|---|
| 370 | <dia:real val="0.05"/> |
|---|
| 371 | </dia:attribute> |
|---|
| 372 | <dia:attribute name="end_arrow"> |
|---|
| 373 | <dia:enum val="3"/> |
|---|
| 374 | </dia:attribute> |
|---|
| 375 | <dia:attribute name="end_arrow_length"> |
|---|
| 376 | <dia:real val="0.3"/> |
|---|
| 377 | </dia:attribute> |
|---|
| 378 | <dia:attribute name="end_arrow_width"> |
|---|
| 379 | <dia:real val="0.2"/> |
|---|
| 380 | </dia:attribute> |
|---|
| 381 | </dia:object> |
|---|
| 382 | <dia:object type="Standard - Text" version="0" id="O12"> |
|---|
| 383 | <dia:attribute name="obj_pos"> |
|---|
| 384 | <dia:point val="2.51071,7.21493"/> |
|---|
| 385 | </dia:attribute> |
|---|
| 386 | <dia:attribute name="obj_bb"> |
|---|
| 387 | <dia:rectangle val="1.28455,6.90749;2.51071,7.30749"/> |
|---|
| 388 | </dia:attribute> |
|---|
| 389 | <dia:attribute name="text"> |
|---|
| 390 | <dia:composite type="text"> |
|---|
| 391 | <dia:attribute name="string"> |
|---|
| 392 | <dia:string>#screen#</dia:string> |
|---|
| 393 | </dia:attribute> |
|---|
| 394 | <dia:attribute name="font"> |
|---|
| 395 | <dia:font name="Times-Roman"/> |
|---|
| 396 | </dia:attribute> |
|---|
| 397 | <dia:attribute name="height"> |
|---|
| 398 | <dia:real val="0.4"/> |
|---|
| 399 | </dia:attribute> |
|---|
| 400 | <dia:attribute name="pos"> |
|---|
| 401 | <dia:point val="2.51071,7.21493"/> |
|---|
| 402 | </dia:attribute> |
|---|
| 403 | <dia:attribute name="color"> |
|---|
| 404 | <dia:color val="#000000"/> |
|---|
| 405 | </dia:attribute> |
|---|
| 406 | <dia:attribute name="alignment"> |
|---|
| 407 | <dia:enum val="2"/> |
|---|
| 408 | </dia:attribute> |
|---|
| 409 | </dia:composite> |
|---|
| 410 | </dia:attribute> |
|---|
| 411 | </dia:object> |
|---|
| 412 | <dia:object type="Standard - Text" version="0" id="O13"> |
|---|
| 413 | <dia:attribute name="obj_pos"> |
|---|
| 414 | <dia:point val="4.53571,7.28993"/> |
|---|
| 415 | </dia:attribute> |
|---|
| 416 | <dia:attribute name="obj_bb"> |
|---|
| 417 | <dia:rectangle val="3.78527,6.98249;5.28615,7.78249"/> |
|---|
| 418 | </dia:attribute> |
|---|
| 419 | <dia:attribute name="text"> |
|---|
| 420 | <dia:composite type="text"> |
|---|
| 421 | <dia:attribute name="string"> |
|---|
| 422 | <dia:string>#uniform |
|---|
| 423 | velocity#</dia:string> |
|---|
| 424 | </dia:attribute> |
|---|
| 425 | <dia:attribute name="font"> |
|---|
| 426 | <dia:font name="Times-Roman"/> |
|---|
| 427 | </dia:attribute> |
|---|
| 428 | <dia:attribute name="height"> |
|---|
| 429 | <dia:real val="0.4"/> |
|---|
| 430 | </dia:attribute> |
|---|
| 431 | <dia:attribute name="pos"> |
|---|
| 432 | <dia:point val="4.53571,7.28993"/> |
|---|
| 433 | </dia:attribute> |
|---|
| 434 | <dia:attribute name="color"> |
|---|
| 435 | <dia:color val="#000000"/> |
|---|
| 436 | </dia:attribute> |
|---|
| 437 | <dia:attribute name="alignment"> |
|---|
| 438 | <dia:enum val="1"/> |
|---|
| 439 | </dia:attribute> |
|---|
| 440 | </dia:composite> |
|---|
| 441 | </dia:attribute> |
|---|
| 442 | </dia:object> |
|---|
| 443 | <dia:object type="Standard - Line" version="0" id="O14"> |
|---|
| 444 | <dia:attribute name="obj_pos"> |
|---|
| 445 | <dia:point val="3.98571,10.6774"/> |
|---|
| 446 | </dia:attribute> |
|---|
| 447 | <dia:attribute name="obj_bb"> |
|---|
| 448 | <dia:rectangle val="3.93572,10.6024;5.06069,10.7274"/> |
|---|
| 449 | </dia:attribute> |
|---|
| 450 | <dia:attribute name="conn_endpoints"> |
|---|
| 451 | <dia:point val="3.98571,10.6774"/> |
|---|
| 452 | <dia:point val="5.01071,10.6524"/> |
|---|
| 453 | </dia:attribute> |
|---|
| 454 | <dia:attribute name="numcp"> |
|---|
| 455 | <dia:int val="1"/> |
|---|
| 456 | </dia:attribute> |
|---|
| 457 | </dia:object> |
|---|
| 458 | <dia:object type="Standard - Text" version="0" id="O15"> |
|---|
| 459 | <dia:attribute name="obj_pos"> |
|---|
| 460 | <dia:point val="6.86071,9.53993"/> |
|---|
| 461 | </dia:attribute> |
|---|
| 462 | <dia:attribute name="obj_bb"> |
|---|
| 463 | <dia:rectangle val="5.63557,9.23249;8.08585,9.63249"/> |
|---|
| 464 | </dia:attribute> |
|---|
| 465 | <dia:attribute name="text"> |
|---|
| 466 | <dia:composite type="text"> |
|---|
| 467 | <dia:attribute name="string"> |
|---|
| 468 | <dia:string>#silicon wafers#</dia:string> |
|---|
| 469 | </dia:attribute> |
|---|
| 470 | <dia:attribute name="font"> |
|---|
| 471 | <dia:font name="Times-Roman"/> |
|---|
| 472 | </dia:attribute> |
|---|
| 473 | <dia:attribute name="height"> |
|---|
| 474 | <dia:real val="0.4"/> |
|---|
| 475 | </dia:attribute> |
|---|
| 476 | <dia:attribute name="pos"> |
|---|
| 477 | <dia:point val="6.86071,9.53993"/> |
|---|
| 478 | </dia:attribute> |
|---|
| 479 | <dia:attribute name="color"> |
|---|
| 480 | <dia:color val="#000000"/> |
|---|
| 481 | </dia:attribute> |
|---|
| 482 | <dia:attribute name="alignment"> |
|---|
| 483 | <dia:enum val="1"/> |
|---|
| 484 | </dia:attribute> |
|---|
| 485 | </dia:composite> |
|---|
| 486 | </dia:attribute> |
|---|
| 487 | </dia:object> |
|---|
| 488 | <dia:object type="Standard - Line" version="0" id="O16"> |
|---|
| 489 | <dia:attribute name="obj_pos"> |
|---|
| 490 | <dia:point val="5.93571,9.66493"/> |
|---|
| 491 | </dia:attribute> |
|---|
| 492 | <dia:attribute name="obj_bb"> |
|---|
| 493 | <dia:rectangle val="4.66108,9.64325;5.95738,10.5133"/> |
|---|
| 494 | </dia:attribute> |
|---|
| 495 | <dia:attribute name="conn_endpoints"> |
|---|
| 496 | <dia:point val="5.93571,9.66493"/> |
|---|
| 497 | <dia:point val="4.76071,10.3399"/> |
|---|
| 498 | </dia:attribute> |
|---|
| 499 | <dia:attribute name="numcp"> |
|---|
| 500 | <dia:int val="1"/> |
|---|
| 501 | </dia:attribute> |
|---|
| 502 | <dia:attribute name="line_width"> |
|---|
| 503 | <dia:real val="0.05"/> |
|---|
| 504 | </dia:attribute> |
|---|
| 505 | <dia:attribute name="end_arrow"> |
|---|
| 506 | <dia:enum val="3"/> |
|---|
| 507 | </dia:attribute> |
|---|
| 508 | <dia:attribute name="end_arrow_length"> |
|---|
| 509 | <dia:real val="0.3"/> |
|---|
| 510 | </dia:attribute> |
|---|
| 511 | <dia:attribute name="end_arrow_width"> |
|---|
| 512 | <dia:real val="0.2"/> |
|---|
| 513 | </dia:attribute> |
|---|
| 514 | </dia:object> |
|---|
| 515 | <dia:object type="Standard - Line" version="0" id="O17"> |
|---|
| 516 | <dia:attribute name="obj_pos"> |
|---|
| 517 | <dia:point val="6.56033,9.7366"/> |
|---|
| 518 | </dia:attribute> |
|---|
| 519 | <dia:attribute name="obj_bb"> |
|---|
| 520 | <dia:rectangle val="5.92184,9.71612;6.58081,10.5296"/> |
|---|
| 521 | </dia:attribute> |
|---|
| 522 | <dia:attribute name="conn_endpoints"> |
|---|
| 523 | <dia:point val="6.56033,9.7366"/> |
|---|
| 524 | <dia:point val="6.08571,10.4149"/> |
|---|
| 525 | </dia:attribute> |
|---|
| 526 | <dia:attribute name="numcp"> |
|---|
| 527 | <dia:int val="1"/> |
|---|
| 528 | </dia:attribute> |
|---|
| 529 | <dia:attribute name="line_width"> |
|---|
| 530 | <dia:real val="0.05"/> |
|---|
| 531 | </dia:attribute> |
|---|
| 532 | <dia:attribute name="end_arrow"> |
|---|
| 533 | <dia:enum val="3"/> |
|---|
| 534 | </dia:attribute> |
|---|
| 535 | <dia:attribute name="end_arrow_length"> |
|---|
| 536 | <dia:real val="0.3"/> |
|---|
| 537 | </dia:attribute> |
|---|
| 538 | <dia:attribute name="end_arrow_width"> |
|---|
| 539 | <dia:real val="0.2"/> |
|---|
| 540 | </dia:attribute> |
|---|
| 541 | </dia:object> |
|---|
| 542 | <dia:object type="Standard - Line" version="0" id="O18"> |
|---|
| 543 | <dia:attribute name="obj_pos"> |
|---|
| 544 | <dia:point val="7.16071,9.76493"/> |
|---|
| 545 | </dia:attribute> |
|---|
| 546 | <dia:attribute name="obj_bb"> |
|---|
| 547 | <dia:rectangle val="7.13744,9.74166;7.62186,10.5381"/> |
|---|
| 548 | </dia:attribute> |
|---|
| 549 | <dia:attribute name="conn_endpoints"> |
|---|
| 550 | <dia:point val="7.16071,9.76493"/> |
|---|
| 551 | <dia:point val="7.43571,10.4649"/> |
|---|
| 552 | </dia:attribute> |
|---|
| 553 | <dia:attribute name="numcp"> |
|---|
| 554 | <dia:int val="1"/> |
|---|
| 555 | </dia:attribute> |
|---|
| 556 | <dia:attribute name="line_width"> |
|---|
| 557 | <dia:real val="0.05"/> |
|---|
| 558 | </dia:attribute> |
|---|
| 559 | <dia:attribute name="end_arrow"> |
|---|
| 560 | <dia:enum val="3"/> |
|---|
| 561 | </dia:attribute> |
|---|
| 562 | <dia:attribute name="end_arrow_length"> |
|---|
| 563 | <dia:real val="0.3"/> |
|---|
| 564 | </dia:attribute> |
|---|
| 565 | <dia:attribute name="end_arrow_width"> |
|---|
| 566 | <dia:real val="0.2"/> |
|---|
| 567 | </dia:attribute> |
|---|
| 568 | </dia:object> |
|---|
| 569 | <dia:object type="Standard - Line" version="0" id="O19"> |
|---|
| 570 | <dia:attribute name="obj_pos"> |
|---|
| 571 | <dia:point val="7.66071,9.76493"/> |
|---|
| 572 | </dia:attribute> |
|---|
| 573 | <dia:attribute name="obj_bb"> |
|---|
| 574 | <dia:rectangle val="7.63897,9.74319;8.85951,10.5638"/> |
|---|
| 575 | </dia:attribute> |
|---|
| 576 | <dia:attribute name="conn_endpoints"> |
|---|
| 577 | <dia:point val="7.66071,9.76493"/> |
|---|
| 578 | <dia:point val="8.76071,10.3899"/> |
|---|
| 579 | </dia:attribute> |
|---|
| 580 | <dia:attribute name="numcp"> |
|---|
| 581 | <dia:int val="1"/> |
|---|
| 582 | </dia:attribute> |
|---|
| 583 | <dia:attribute name="line_width"> |
|---|
| 584 | <dia:real val="0.05"/> |
|---|
| 585 | </dia:attribute> |
|---|
| 586 | <dia:attribute name="end_arrow"> |
|---|
| 587 | <dia:enum val="3"/> |
|---|
| 588 | </dia:attribute> |
|---|
| 589 | <dia:attribute name="end_arrow_length"> |
|---|
| 590 | <dia:real val="0.3"/> |
|---|
| 591 | </dia:attribute> |
|---|
| 592 | <dia:attribute name="end_arrow_width"> |
|---|
| 593 | <dia:real val="0.2"/> |
|---|
| 594 | </dia:attribute> |
|---|
| 595 | </dia:object> |
|---|
| 596 | <dia:object type="Standard - Box" version="0" id="O20"> |
|---|
| 597 | <dia:attribute name="obj_pos"> |
|---|
| 598 | <dia:point val="9.66071,7.18993"/> |
|---|
| 599 | </dia:attribute> |
|---|
| 600 | <dia:attribute name="obj_bb"> |
|---|
| 601 | <dia:rectangle val="9.66071,7.18993;10.3107,7.58993"/> |
|---|
| 602 | </dia:attribute> |
|---|
| 603 | <dia:attribute name="elem_corner"> |
|---|
| 604 | <dia:point val="9.66071,7.18993"/> |
|---|
| 605 | </dia:attribute> |
|---|
| 606 | <dia:attribute name="elem_width"> |
|---|
| 607 | <dia:real val="0.65"/> |
|---|
| 608 | </dia:attribute> |
|---|
| 609 | <dia:attribute name="elem_height"> |
|---|
| 610 | <dia:real val="0.4"/> |
|---|
| 611 | </dia:attribute> |
|---|
| 612 | <dia:attribute name="border_width"> |
|---|
| 613 | <dia:real val="0"/> |
|---|
| 614 | </dia:attribute> |
|---|
| 615 | <dia:attribute name="border_color"> |
|---|
| 616 | <dia:color val="#ffffff"/> |
|---|
| 617 | </dia:attribute> |
|---|
| 618 | <dia:attribute name="show_background"> |
|---|
| 619 | <dia:boolean val="true"/> |
|---|
| 620 | </dia:attribute> |
|---|
| 621 | </dia:object> |
|---|
| 622 | <dia:object type="Standard - Box" version="0" id="O21"> |
|---|
| 623 | <dia:attribute name="obj_pos"> |
|---|
| 624 | <dia:point val="9.66071,8.46493"/> |
|---|
| 625 | </dia:attribute> |
|---|
| 626 | <dia:attribute name="obj_bb"> |
|---|
| 627 | <dia:rectangle val="9.66071,8.46493;10.3107,8.86493"/> |
|---|
| 628 | </dia:attribute> |
|---|
| 629 | <dia:attribute name="elem_corner"> |
|---|
| 630 | <dia:point val="9.66071,8.46493"/> |
|---|
| 631 | </dia:attribute> |
|---|
| 632 | <dia:attribute name="elem_width"> |
|---|
| 633 | <dia:real val="0.65"/> |
|---|
| 634 | </dia:attribute> |
|---|
| 635 | <dia:attribute name="elem_height"> |
|---|
| 636 | <dia:real val="0.4"/> |
|---|
| 637 | </dia:attribute> |
|---|
| 638 | <dia:attribute name="border_width"> |
|---|
| 639 | <dia:real val="0"/> |
|---|
| 640 | </dia:attribute> |
|---|
| 641 | <dia:attribute name="border_color"> |
|---|
| 642 | <dia:color val="#ffffff"/> |
|---|
| 643 | </dia:attribute> |
|---|
| 644 | <dia:attribute name="show_background"> |
|---|
| 645 | <dia:boolean val="true"/> |
|---|
| 646 | </dia:attribute> |
|---|
| 647 | </dia:object> |
|---|
| 648 | <dia:object type="Standard - Text" version="0" id="O22"> |
|---|
| 649 | <dia:attribute name="obj_pos"> |
|---|
| 650 | <dia:point val="9.03571,7.66493"/> |
|---|
| 651 | </dia:attribute> |
|---|
| 652 | <dia:attribute name="obj_bb"> |
|---|
| 653 | <dia:rectangle val="8.19083,7.35749;9.83059,8.15749"/> |
|---|
| 654 | </dia:attribute> |
|---|
| 655 | <dia:attribute name="text"> |
|---|
| 656 | <dia:composite type="text"> |
|---|
| 657 | <dia:attribute name="string"> |
|---|
| 658 | <dia:string>#gas |
|---|
| 659 | exhausts#</dia:string> |
|---|
| 660 | </dia:attribute> |
|---|
| 661 | <dia:attribute name="font"> |
|---|
| 662 | <dia:font name="Times-Roman"/> |
|---|
| 663 | </dia:attribute> |
|---|
| 664 | <dia:attribute name="height"> |
|---|
| 665 | <dia:real val="0.4"/> |
|---|
| 666 | </dia:attribute> |
|---|
| 667 | <dia:attribute name="pos"> |
|---|
| 668 | <dia:point val="9.03571,7.66493"/> |
|---|
| 669 | </dia:attribute> |
|---|
| 670 | <dia:attribute name="color"> |
|---|
| 671 | <dia:color val="#000000"/> |
|---|
| 672 | </dia:attribute> |
|---|
| 673 | <dia:attribute name="alignment"> |
|---|
| 674 | <dia:enum val="1"/> |
|---|
| 675 | </dia:attribute> |
|---|
| 676 | </dia:composite> |
|---|
| 677 | </dia:attribute> |
|---|
| 678 | </dia:object> |
|---|
| 679 | <dia:object type="Standard - Box" version="0" id="O23"> |
|---|
| 680 | <dia:attribute name="obj_pos"> |
|---|
| 681 | <dia:point val="9.61071,9.73993"/> |
|---|
| 682 | </dia:attribute> |
|---|
| 683 | <dia:attribute name="obj_bb"> |
|---|
| 684 | <dia:rectangle val="9.61071,9.73993;10.2607,10.1399"/> |
|---|
| 685 | </dia:attribute> |
|---|
| 686 | <dia:attribute name="elem_corner"> |
|---|
| 687 | <dia:point val="9.61071,9.73993"/> |
|---|
| 688 | </dia:attribute> |
|---|
| 689 | <dia:attribute name="elem_width"> |
|---|
| 690 | <dia:real val="0.65"/> |
|---|
| 691 | </dia:attribute> |
|---|
| 692 | <dia:attribute name="elem_height"> |
|---|
| 693 | <dia:real val="0.4"/> |
|---|
| 694 | </dia:attribute> |
|---|
| 695 | <dia:attribute name="border_width"> |
|---|
| 696 | <dia:real val="0"/> |
|---|
| 697 | </dia:attribute> |
|---|
| 698 | <dia:attribute name="border_color"> |
|---|
| 699 | <dia:color val="#ffffff"/> |
|---|
| 700 | </dia:attribute> |
|---|
| 701 | <dia:attribute name="show_background"> |
|---|
| 702 | <dia:boolean val="true"/> |
|---|
| 703 | </dia:attribute> |
|---|
| 704 | </dia:object> |
|---|
| 705 | <dia:object type="Standard - Line" version="0" id="O24"> |
|---|
| 706 | <dia:attribute name="obj_pos"> |
|---|
| 707 | <dia:point val="5.43569,10.6774"/> |
|---|
| 708 | </dia:attribute> |
|---|
| 709 | <dia:attribute name="obj_bb"> |
|---|
| 710 | <dia:rectangle val="5.38571,10.6024;6.51068,10.7274"/> |
|---|
| 711 | </dia:attribute> |
|---|
| 712 | <dia:attribute name="conn_endpoints"> |
|---|
| 713 | <dia:point val="5.43569,10.6774"/> |
|---|
| 714 | <dia:point val="6.46069,10.6524"/> |
|---|
| 715 | </dia:attribute> |
|---|
| 716 | <dia:attribute name="numcp"> |
|---|
| 717 | <dia:int val="1"/> |
|---|
| 718 | </dia:attribute> |
|---|
| 719 | </dia:object> |
|---|
| 720 | <dia:object type="Standard - Line" version="0" id="O25"> |
|---|
| 721 | <dia:attribute name="obj_pos"> |
|---|
| 722 | <dia:point val="6.91069,10.6774"/> |
|---|
| 723 | </dia:attribute> |
|---|
| 724 | <dia:attribute name="obj_bb"> |
|---|
| 725 | <dia:rectangle val="6.86071,10.6024;7.98568,10.7274"/> |
|---|
| 726 | </dia:attribute> |
|---|
| 727 | <dia:attribute name="conn_endpoints"> |
|---|
| 728 | <dia:point val="6.91069,10.6774"/> |
|---|
| 729 | <dia:point val="7.93569,10.6524"/> |
|---|
| 730 | </dia:attribute> |
|---|
| 731 | <dia:attribute name="numcp"> |
|---|
| 732 | <dia:int val="1"/> |
|---|
| 733 | </dia:attribute> |
|---|
| 734 | </dia:object> |
|---|
| 735 | <dia:object type="Standard - Line" version="0" id="O26"> |
|---|
| 736 | <dia:attribute name="obj_pos"> |
|---|
| 737 | <dia:point val="8.41069,10.6774"/> |
|---|
| 738 | </dia:attribute> |
|---|
| 739 | <dia:attribute name="obj_bb"> |
|---|
| 740 | <dia:rectangle val="8.36071,10.6024;9.48568,10.7274"/> |
|---|
| 741 | </dia:attribute> |
|---|
| 742 | <dia:attribute name="conn_endpoints"> |
|---|
| 743 | <dia:point val="8.41069,10.6774"/> |
|---|
| 744 | <dia:point val="9.43569,10.6524"/> |
|---|
| 745 | </dia:attribute> |
|---|
| 746 | <dia:attribute name="numcp"> |
|---|
| 747 | <dia:int val="1"/> |
|---|
| 748 | </dia:attribute> |
|---|
| 749 | </dia:object> |
|---|
| 750 | </dia:layer> |
|---|
| 751 | </dia:diagram> |
|---|